Microelectromechanical System Device Thiab Method Ua Ib Yam

1. Tam sim no invention muaj feem xyuam rau kev teb ntawm micro-mechanical systems, thiab tshwj xeeb tshaj yog rau ib tug micro-electromechanical system ntaus ntawv thiab nws cov qauv ntim.

Cov txheej txheem hauv qab:

2. Micro-electro-mechanical system (mems, micro-electro-mechanical system), tseem hu ua micro-electro-mechanical system, micro-system, micro-machine, thiab lwm yam, hais txog cov khoom siv high-tech nrog qhov loj ntawm ob peb millimeters lossis me dua.

3. Microelectromechanical systems devices (los yog mems devices) yog cov khoom siv uas siv cov tshuab semiconductor los tsim cov khoom siv tshuab thiab hluav taws xob. Cov khoom siv MEMS nquag muaj xws li resonators, accelerators, siab sensors, actuators, iav, heaters, thiab tshuab luam ntawv nozzles. Cov qauv kev hloov pauv, xws li tawg, wrinkling, delamination, warping, folding, thiab lwm yam, tuaj yeem ua rau tsis ua haujlwm ntawm cov khoom siv.

4. Raws li cov lus hais saum toj no, nws yog ib qho tsim nyog los muab cov khoom siv MEMS tshiab thiab nws cov qauv ntim khoom.

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