Pob txha Conduction Sensor Chip Fabrication Method

1. Cov cuab yeej siv tam sim no cuam tshuam nrog kev ua haujlwm ntawm micro-electro-mechanical system (mems), tshwj xeeb tshaj yog rau pob txha conduction sensor nti.

Cov txheej txheem hauv qab:

2. Nrog rau kev loj hlob sai ntawm mems technology, mems pob txha conduction sensor nti (tom qab no hu ua pob txha conduction sensor nti) tau los ua. Ib qho piv txwv ntawm cov pob txha conduction sensor nti feem ntau suav nrog lub phaj nraub qaum thiab lub vibrating daim nyias nyias nyias nyias, thiab ib qho loj raug tshem tawm ntawm sab ntawm lub vibrating daim nyias nyias ntawm sab nraub qaum. Qhov loj thaiv xav tau cov pob txha kev co tsim los ntawm kev co ntawm lub suab cords thiab generates mechanical vibration. Cov neeg kho tshuab kev vibration ntawm pawg loj tsav lub vibrating membrane kom vibrate, yog li hloov qhov kev ncua deb ntawm lub nraub qaum phaj thiab lub vibrating daim nyias nyias, thiab tom qab ntawd hloov lub capacitance teeb liab, thiaj li kom paub qhov pom ntawm lub suab teeb liab. . Txawm li cas los xij, qhov rhiab heev ntawm cov pa hluav taws xob cov pa hluav taws xob sensor nti tsis ruaj khov, uas txwv nws daim ntawv thov teb.

Tiv tauj peb:

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