Kev paub txog cov ntsiab lus ntawm kev tso tawm tom qab CMOS rau cov qauv ntoo khaub lig-beam rhiab rau MEMS vector hydrophones:

Kev siv cov ntsiab lus:

5. Yuav kom daws tau qhov teeb meem ntawm kev ua kom tiav cov qauv tso tawm nyob rau hauv lub hauv paus ntsiab lus ntawm kev sib haum nrog cmos los ntawm kev siv cov txheej txheem mems, tam sim no invention muab ib tug post-cmos tso txoj kev rau tus ntoo khaub lig beam rhiab qauv ntawm mems vector hydrophone.

6. Lub tswv yim tam sim no tau ua tiav los ntawm cov kev daws teeb meem hauv qab no: ib txoj hauv kev tso tawm cmos tom qab tus ntoo khaub lig beam rhiab qauv taw qhia rau mems vector hydrophone, suav nrog cov kauj ruam hauv qab no: kauj ruam (1) organically ntxuav lub cmos nti kom tshem tawm cov impurities nto; xaiv cmos nti, siv lead ua orientation "100", p-type substrate, silicon nitride passivation txheej nyob rau hauv qhov chaw mems tau raug qauv hauv cov txheej txheem cmos.

7. Kauj Ruam (2) Sib sib zog nqus silicon etching lub substrate silicon, siv cov silicon nitride passivation txheej ua lub npog ntsej muag kom etch cov silicon raug; sib sib zog nqus silicon etching tau

Tiv tauj peb:

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