Kev tsim cov txheej txheem ntawm MEMS ntaus ntawv

technical teb

1. Qhov kev nthuav qhia tam sim no muaj feem xyuam rau cov khoom siv mems nrog kev txhim kho kev ntxhov siab.

Cov txheej txheem hauv qab:

2. Raws li paub zoo, mems ("Micro Electro Mechanical Systems") cov khoom siv hluav taws xob, xws li actuators thiab/los yog sensors, feem ntau yog tsim los ntawm lub substrate vaj tse nyob hauv kab noj hniav thiab suav nrog cov qauv txav tau tshem tawm ntawm cov kab noj hniav saum toj no thiab txwv los ntawm elastic element mus rau qhov chaw ruaj. Lub substrate, cov qauv txav tau, thiab cov khoom elastic tuaj yeem yog qhov tseem ceeb, thiab feem ntau yog tsim los ntawm cov khoom siv semiconductor xws li silicon.

3. Cov khoom siv hluav taws xob no kuj suav nrog: ib lossis ntau qhov kev ua haujlwm thiab / lossis cov qauv kuaj pom, ua ke nrog cov qauv txav tau; thiab hluav taws xob tswj circuits, kev koom ua ke nyob rau hauv tib lub substrate los yog tsim nyob rau hauv sib txawv substrates thiab Coupling mus rau lub actuation thiab / los yog nrhiav kom tau qauv muaj peev xwm muab hluav taws xob tsav teeb liab mus rau lub actuation qauv thiab / los yog tau txais hluav taws xob ntes cov teeb liab los ntawm cov qauv kuaj pom.

4. Nyob rau hauv kev nthuav dav, cov qauv actuating yuav ua rau kev hloov pauv, piv txwv li kev sib hloov, ntawm cov qauv txav tau thaum tswj tau los ntawm cov teeb liab tsav hluav taws xob sib raug. Ib yam li ntawd, cov qauv kuaj pom tau teeb tsa los tsim cov khoom siv hluav taws xob sib txuas uas yog qhov ua haujlwm ntawm kev ua haujlwm ntawm cov qauv txav, thiab piv txwv li, kev ua haujlwm ntawm kev sib hloov ntawm cov qauv txav tau.

5. Cov hluav taws xob tswj Circuit Court thiab cov actuation thiab / los yog cov qauv kuaj pom feem ntau yog cov khoom siv hluav taws xob txuas nrog ib leeg los ntawm cov kab hluav taws xob conductive, xws li tsim los ntawm ib pawg ntawm cov txheej txheem conductive.

6. Cov kab hluav taws xob feem ntau txuas mus rau thaj chaw ruaj khov, cov ntsiab lus elastic, thiab qee zaum ib nrab ntawm cov qauv txav tau.

7. Hauv kev siv, kev hloov pauv ntawm cov qauv txav tau ua rau deformation, xws li kev sib tw, ntawm cov khoom elastic uas txwv cov qauv txav mus rau qhov chaw ruaj khov.

Tiv tauj peb:

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