Tsim thiab npaj txoj kev PMUT nrog kev sib cais trench

Tsim thiab npaj txoj kev ntawm pmut nrog kev sib cais trench

technical teb

1. Tam sim no invention muaj feem xyuam rau cov technical field ntawm pmut, tshwj xeeb tshaj yog rau ib tug tsim thiab npaj txoj kev ntawm ib tug pmut nrog ib tug cais trench.

Cov txheej txheem hauv qab:

2. MEMS technology yog micro-scale mechatronics system technology tsim nyob rau hauv xyoo tsis ntev los no. Raws li mems thev naus laus zis, cov kws tshawb fawb tau tsim thiab tsim lub micromachined ultrasonic transducer. Piv nrog rau cov tsoos ultrasonic transducers, nws muaj qhov zoo ntawm miniaturization, kev koom ua ke, kev ua haujlwm siab thiab tus nqi qis, thiab tau dhau los ua ib qho tseem ceeb ntawm kev tshawb fawb cov lus qhia ntawm ultrasonic transducers. Raws li txoj cai ua haujlwm, mut tuaj yeem muab faib ua capacitive micromachined ultrasonic transducers thiab piezoelectric micromachined ultrasonic transducers. cmut feem ntau yuav tsum muaj DC siab tsis ncaj voltage kom tau raws li kev xa tawm siab thiab tau txais rhiab heev, uas ua rau qee qhov teeb meem rau kev tsim hluav taws xob thiab kev sib koom ua ke thiab kev tsim khoom. cmut feem ntau yuav tsum muaj DC siab tsis ncaj voltage kom tau raws li kev xa tawm siab thiab tau txais rhiab heev, uas ua rau muaj qee yam teeb meem rau kev tsim hluav taws xob thiab kev sib koom ua ke thiab kev tsim khoom. Piv nrog cmut, pmut tsis xav tau high voltage kom tau siab rhiab heev, thiab muaj me ntsis cuam tshuam parasitic capacitance, tsawg zog noj, thiab yooj yim rau integrate nrog cmos circuits. Lub hauv paus ntsiab lus ntawm pmut feem ntau yog cov nyhuv piezoelectric. Thaum lub piezoelectric siv lead ua deformed los ntawm kev siv lub zog sab nraud nyob rau hauv ib qho kev taw qhia tshwj xeeb, qhov zoo thiab qhov tsis zoo ntawm cov khoom siv hluav taws xob yuav raug tsim tawm ntawm ob qhov sib txawv ntawm cov siv lead ua, uas yog hu ua cov nyhuv piezoelectric zoo; thiab thaum muaj hluav taws xob siv nyob rau hauv cov siv lead ua polarization kev taw qhia, nws yuav ua rau cov siv lead ua deformed, thiab cov siv lead ua rov qab mus rau nws cov duab qub tom qab tshem tawm cov hluav taws xob. Qhov tshwm sim no yog hu ua inverse piezoelectric effect. Thaum pmut siv los ua ib qho kev xa tawm, qhov hluav taws xob nruab nrab ntawm cov hluav taws xob sab saud thiab qis ua rau cov txheej txheem piezoelectric muaj qhov cuam tshuam piezoelectric, uas ua rau muaj kev vibration siab thiab tom qab ntawd radiates ultrasonic tsis; Thaum siv los ua tus txais, lub suab siab ua rau ntawm piezoelectric txheej, uas ua rau deformation. Vim muaj qhov zoo piezoelectric effect Ua rau lub teeb liab hluav taws xob tsim tawm ntawm cov hluav taws xob sab sauv thiab sab qis. Cov qauv yooj yim ntawm pmut yog cov qauv raug tshem tawm cov yeeb yaj kiab, cov txheej txheem piezoelectric nyob nruab nrab ntawm cov txheej txheem sab saum toj thiab hauv qab electrode, thiab cov substrate feem ntau yog insulating substrate silicon (silicon-on-insulator, soi). Cov txheej insulating feem ntau yog silicon dioxide (sio2). Lub luag haujlwm tseem ceeb hauv cov txheej txheem ua haujlwm yog cov txheej txheem ua yeeb yaj kiab raug tshem tawm uas muaj cov txheej txheem saum toj kawg nkaus, txheej piezoelectric, txheej hauv qab electrode thiab txheej insulating.

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